Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films

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Abstract

The paper describes the thermodynamic modeling and experimental study of the synthesis of vanadium oxide films at various temperatures from the tetrakis(ethylmethylaminovanadium) V[NC3H8]4 precursor in the presence of oxygen in an argon atmosphere. The thermodynamic modeling was carried out using the calculation of chemical equilibria based on the minimization of the Gibbs energy of the system. In the experimental part of the paper, the films were synthesized by the atomic layer deposition procedure. The thermodynamic modeling and experimental results agree with each other and can be used to develop procedures for the synthesis of film coatings based on vanadium oxides.

About the authors

V. A. Shestakov

Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University of Architecture and Civil Engineering

Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia; 630008, Novosibirsk, Russia

V. A. Seleznev

Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences

Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia

S. V. Mutilin

Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences

Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia

V. N. Kichay

Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences

Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia

L. V. Yakovkina

Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences

Author for correspondence.
Email: vsh@niic.nsc.ru
630008, Novosibirsk, Russia

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Copyright (c) 2023 В.А. Шестаков, В.А. Селезнев, С.В. Мутилин, В.Н. Кичай, Л.В. Яковкина