Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma

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Дәйексөз келтіру

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Рұқсат жабық Тек жазылушылар үшін

Аннотация

The model-based study of SF6 plasma composition in respect to both neutral and charged components in a wide range of electron density was carried out. The key plasma chemical processes determining steady-state densities if fluorine atoms under conditions of low- and high-density plasmas were figured out. It was shown that optimized (reduced by the exclusion of non-effective reactions) kinetic schemes provide the satisfactory agreement between modeling results and experimental data from literature sources.

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Авторлар туралы

A. Myakonkikh

Valiev Institute of Physics and Technology RAS

Хат алмасуға жауапты Автор.
Email: miakonkikh@ftian.ru
Ресей, Moscow

V. Kuzmenko

Valiev Institute of Physics and Technology RAS

Email: miakonkikh@ftian.ru
Ресей, Moscow

A. Efremov

Valiev Institute of Physics and Technology RAS; Molecular Electronics Research Institute (MERI)

Email: miakonkikh@ftian.ru
Ресей, Moscow; Zelenograd

K. Rudenko

Valiev Institute of Physics and Technology RAS

Email: miakonkikh@ftian.ru
Ресей, Moscow

Әдебиет тізімі

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Әрекет
1. JATS XML
Жүктеу
2. Fig. 1. Rate constants of reactions under the action of electron impact involving SF6 molecules leading to the formation of neutral (a) and charged (b) products. In Fig. b): solid lines - ionization, dashed lines - sticking. The numerical labels on the solid curves correspond to the reaction number in Tables 1 and 2.

Жүктеу (105KB)
Метадеректер
3. Fig. 2. Concentrations of neutral particles (a) and kinetics of fluorine atom formation (b) at = 3 eV. The numerical labels on the solid curves in Fig. b) correspond to the reaction number in Tables 1 and 2, with the number in parentheses reflecting the value of the parameter “x” in the SFx formula. The dotted line shows the total rate of atom formation.

Жүктеу (124KB)
Метадеректер
4. Fig. 3. Comparison of calculated (dashed line) and experimental (solid line + symbols) concentrations of fluorine atoms from [15] (a) and [16] (b). Both experimental curves in Fig. a) correspond to the same conditions of plasma excitation, but were obtained at different values of the actinometric coefficient.

Жүктеу (60KB)
Метадеректер
5. Fig. 4. Concentrations of positive (a) and negative (b) ions at = 3 eV. The dotted line shows the total concentration.

Жүктеу (109KB)
Метадеректер

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