ТЕХНОЛОГИИ

Шығарылым Атауы Файл
Том 53, № 6 (2024) Plasma Parameters and Si/SiO2 Etching Kinetics in Mixtures of Fluorocarbon Gases with Argon and Helium PDF
(Rus)
Efremov A., Betelin V., Kwon K.
Том 53, № 6 (2024) Conductivity Study of Carbon Nanotubes Deposited on Iridium Silicon-Silicide Substrate PDF
(Rus)
Kerimov E.
Том 53, № 5 (2024) Producing of graphene: deposition and annealing PDF
(Rus)
Shustin Е.
Том 53, № 4 (2024) Methodology of Production of Photo-Sensitive Elements on Ptsi Basis PDF
(Rus)
Kerimov E.
Том 53, № 4 (2024) Al Islands on Si(111): Growth Temperature, Morphology and Strain PDF
(Rus)
Lomov A., Zakharov D., Tarasov M., Chekushkin A., Tatarintsev A., Vasiliev A.
Том 53, № 4 (2024) Plasmochemical and Reactive Ion Etching of Gallium Arsenide in Difluorodichloromethane with Helium PDF
(Rus)
Murin D., Chesnokov I., Gogulev I., Anokhin A., Moloskin A.
Том 53, № 2 (2024) Ripple of a DC/DC converter based on SEPIC topology PDF
(Rus)
Bityukov V., Lavrenov A.
Том 53, № 2 (2024) Influence of nickel impurities on the operational parameters of a silicon solar cell PDF
(Rus)
Kenzhaev Z., Zikrillaev N., Odzhaev V., Ismailov K., Prosolovich V., Zikrillaev K., Koveshnikov S.
Том 53, № 2 (2024) Temporary changes in current flow mechanisms in erbium-doped porous silicon PDF
(Rus)
Khamzin E., Uslin D.
Том 53, № 1 (2024) Features of Electroforming and Functioning of Memristors Based on Open TiN–SiO2–Mo Sandwich Structures PDF
(Rus)
Gorlachev E., Mordvintsev V., Kudryavtsev S.
Том 53, № 1 (2024) Molecular Layering of an Additive Layer of Silicon Dioxide on Anodized Tantalum and Niobium Oxides PDF
(Rus)
Ezhovskii Y., Mikhailovskii S.
Том 53, № 1 (2024) Parameters and Composition of Plasma in a Mixture of CF4 + H2 + Ar: Effect of the CF4/H2 Ratio PDF
(Rus)
Miakonkikh A., Kuzmenko V., Efremov A., Rudenko K.
Том 53, № 1 (2024) Interconnects Materials for Integrated Circuit Technology Below 5 Nm Node PDF
(Rus)
Rogozhin A., Glaz O.
Том 53, № 1 (2024) Application of Spectral Ellipsometry for Dielectric, Metal and Semiconductor Films in Microelectronics Technology PDF
(Rus)
Gaidukasov R., Miakonkikh A.
Том 52, № 5 (2023) Effect of the Material of Electrodes on Electroformation and Properties of Memristors Based on Open Metal–SiO2–Metal Sandwich Structures PDF
(Rus)
Mordvintsev V., Kudryavtsev S., Naumov V., Gorlachev E.
Том 52, № 4 (2023) Effect of Magnetron Sputtering Power on ITO Film Deposition at Room Temperature PDF
(Rus)
Saenko A., Vakulov Z., Klimin V., Bilyk G., Malyukov S.
Том 52, № 4 (2023) Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition PDF
(Rus)
Fadeev A., Myakon’kikh A., Smirnova E., Simakin S., Rudenko K.
Том 52, № 3 (2023) Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology PDF
(Rus)
Polushkin E., Nefed’ev S., Koval’chuk A., Soltanovich O., Shapoval S.
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